Used LAM RESEARCH 9600 #9399061 for sale

LAM RESEARCH 9600 is a high-end, multi-chamber, batch Dimensional Etcher/Asher specifically designed for production applications. It is one of the most advanced etchers/ashers available, providing extensive flexibility and process capability through its multiple processing chambers, which can be configured to meet individual process requirements. The equipment utilizes high yield, plasma-enhanced chemical etching (PECVD) to selectively etch or asher a wide range of materials. 9600 enables precise, high-throughput etching and ashing of multi-layer interconnects, semiconductor components, and other patterned substrates down to sub-micron dimensions. The system's chamber configuration flexibility offers maximum process capability and flexibility, enabling parallel processing of multiple wafers and optional stacking and loading of multiple cassettes. LAM RESEARCH 9600's precise and adjustable chemical etching results in higher yields and efficiency of wafer manufacturing. It is equipped with the latest and most advanced etching technology, such as: selectable source and loading systems, including plasma-enhanced chemical vapor deposition, chemical vapor deposition, and reactive ion etching; temperature, pressure, and chemical flow rate controllers; and advanced gas flow and exhaust control unit, for improved safety and maintenance. 9600 also features an advanced control machine that provides process parameter and error recording, wafer positioning and monitoring tool, fully automated end-point monitoring, and flexible user-defined process recipes. Its intuitive Graphical User Interface (GUI) provides a straightforward, improved user experience and manufacturer interface. LAM RESEARCH 9600 is designed to meet the rigorous and fast timeline of production applications. It offers a 100% clean temperature, pressure, and process chamber conditions, as well as real-time process control feedback and feedback readout. It is configured as a batch process machine, allowing rapid processing of up to 200 wafers per hour, with operator-defined process recipes and automation settings. 9600 is designed with a very robust operational asset that requires minimal maintenance, and is user-friendly, featuring a safe and easy on-the-fly adjustments. The model meets rigorous ESD standards and makes sure that all wafers are free of contaminants by utilizing a 100% clean temperature and exhaust chamber, process chamber seals, and other safety features. It is equipped with a real-time process monitoring equipment and an end-point alarm system for improved process control.