Used LAM RESEARCH A4 9400 PTX #9224718 for sale
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ID: 9224718
Process module
Includes:
VAT 65 Gate valve with controller
ADIXEN / ALCATEL 1300M Turbo pump with ADIXEN ACT 1300 controller
VME Chassis: 021
Bias match assembly: 018
ESC Frosted TCP window: 8"
TCP Match dual endpoint detector module
ESC Power supply.
LAM RESEARCH A4 9400 PTX is an advanced, high-performance, precision etcher/asher designed to facilitate rapid, precise, and accurate pattern transfer for a wide range of materials. The etcher/asher is equipped with programmable process control functions, offering users the ability to customize the process parameters to achieve optimal results. A4 9400 PTX etcher/asher includes an advanced, integrated ion milling system which delivers higher levels of accuracy, speed, and pattern fidelity than traditional sputter etchers. The ion milling system is equipped with a variable-power RF generator and is encased in a low-pressure plasma-confined chamber, allowing for greater flexibility when etching delicate structures and highly precise patterns. LAM RESEARCH A4 9400 PTX comes equipped with a unique sample-relative motion stage, allowing for tighter control of the pattern etch and improved positioning accuracy. This feature is particularly attractive to those users involved in larger scale sample work where precise alignment and registration of patterns is crucial. A4 9400 PTX incorporates a range of advanced process parameters such as total gas open time, deposition rate, angle of incidence, erosion angle, and time delay. These features enable users to tune the etcher/asher to their specific process requirements resulting in excellent pattern transfer accuracy. LAM RESEARCH A4 9400 PTX also offers a range of accessories, including a loadlock, tilt-mounted sample holder, and segmented electrostatic chucking plates. This allows for the flexibility of a variety of sample sizes and geometry. The system is further enhanced with a 2.0KW power supply, engineered for high reliability and precise control over process conditions. A4 9400 PTX is a highly advanced etcher/asher that ensures precision, efficiency, and quality in pattern transfer and sample preparation processes. It provides users with a wide range of process control functions, giving them the ability to tailor the etcher/asher according to their specific requirements. The range of accessories and features make LAM RESEARCH A4 9400 PTX an ideal choice for high-precision pattern production and sample preparation.
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