Used LAM RESEARCH A4 9400 #9127504 for sale

LAM RESEARCH A4 9400 is an advanced etcher/asher designed to provide users with versatile and cost effective solutions for complex via formation and patterning applications. With advanced features, such as an integrated RF generator, high pressure process chamber, and the ability to easily switch between etch and ashing recipe types, A4 9400 is an ideal choice for semiconductor manufacturers and research labs that require a reliable medium-load etcher/asher for their versatile ion processing needs. LAM RESEARCH A4 9400's innovative design includes a high-pressure process chamber featuring a base pressure of better than 1x10-4 torr, enabling users to achieve optimum process performance for any etch and deposition variations. This advanced chamber also allows for a peak practical background pressure of 1x10-6 torr through the use of eSFOC-high pressure pumping technology. The efficient RF generator integrated into A4 9400 provides a large amount of power up to 500w, giving users the capability to generate higher RF plasma densities. This RF power allows users to produce thicker films with lower material loss and charge neutralization efficiency, resulting in higher process yields and tighter pattern tolerances. LAM RESEARCH A4 9400 also offers a number of safety features, such as a purge system that can be activated to ensure clean operation, and an RF guard system designed to protect nearby personnel and equipment. In addition, A4 9400 features an ergonomically designed industrial work unit, allowing users to position their workpieces comfortably and efficiently while they etch or asher them. In addition to its superior performance, LAM RESEARCH A4 9400 also offers easy recipe switching and high processing speed. It can switch from etching to ashing recipes in as little as 2 seconds, allowing users to quickly change recipe formulations to suit their particular process needs. A4 9400 also enables users to achieve process speeds of up to 4,500 wafers per hour, allowing for quick and efficient runs. LAM RESEARCH A4 9400 is a reliable and versatile medium-load etcher and asher that meets the demands of the semiconductor manufacturing and research industry. With its advanced etch and ashing capabilities, powerful RF generator, high-pressure process chamber, easy recipe switching, and high-speed processing, A4 9400 is the ideal solution for ion processing application requirements.