Used LAM RESEARCH A4 9400 #9198122 for sale

LAM RESEARCH A4 9400 is an etcher/asher designed for high-volume production applications. It is capable of performing a variety of etching processes, including etching of wafers and other substrates with etchants such as x-ray lithography, argon-fluoride, and chlorine-based etchants. The etcher/asher incorporates a single vacuum chamber that is used for both etching and cleaning. Vacuum pressure is in the range of 5 to 10 mTorr. The new design provides a fully integrated control of the etching and cleaning processes, including a unique thermal control of the substrate surface. A4 9400 offers a wide range of options and features, including a fully automated process with automatic settings adjustment, a choice of etching times and parameters available to optimize the etching process, and a direct computer control station. LAM RESEARCH A4 9400 also sports multiple etchin heads, which can be individually adjusted for handling different substrates and different applications. The built-in RF generator has been optimized for best performance and can be simply adjusted for different etching requirements. A4 9400 is equipped with NEBB Clean certification, ensuring consistent and reliable cleaning results. A fully integrated safety system ensures that all operations are performed within safety regulations. LAM RESEARCH A4 9400 is a reliable, high-performance etcher/asher for high-volume production applications. The system can provide repeatable, reliable, and safe etching without sacrificing quality. It features an advanced communication interface, allowing easy integration of various OEM systems and other system components, making it an ideal choice for various industrial and research settings. Furthermore, its integrated safety systems ensure that all etching operations are performed within safety regulations.