Used LAM RESEARCH A4 #148352 for sale

LAM RESEARCH A4 is a highly advanced etching tool specifically designed for precision wafer fabrication. The device is outfitted with a unique four-way source alignment equipment that enables it to perform high-aspect ratio etching at a high repeatability rate. This new system includes a patented vision inspection module which is capable of discovering even the most subtle defects as well as measuring the etched depths accurately. LAM RESEARCH A-4 is a high-performance wafer etching tool designed for semiconductor substrate processing. It uses advanced plasma chemistry to perform a variety of high aspect ratio etching in the field of wafer fabrication. The product consists of four sources that are arranged in a cross pattern over the wafer. This allows for the etch rate to be distributed evenly over the entire wafer surface. To ensure repeatability and accuracy, A4 is equipped with a special four-way source alignment unit that is optimized for thin displays and advanced electronic packaging technologies. The device is also capable of recognizing and stopping eroding at locations that exceed the design specifications. Furthermore, it is programmed with a two-dimensional look-down etch (2D-LDE) feature that can detect surface defects on wafers and create intricate structures. The 2D-LDE allows for the fabrication of sub-quarter micron structures as well as complex geometries such as through-hole vias. The robust processing capabilities of A-4 are supported by the product's unique vision inspection module. This module is able to detect the presence of etching defects, such as surface depressions, dents, and other features, at the sub-micron level. It can also measure depths accurately and report false indication problems. The module also supports real-time post-etch process control as well as yield improvement through higher precision of the etched features. Finally, the product is equipped with monitoring and feedback functions that allow for process optimization and greater traceability. In summary, LAM RESEARCH A4 is a highly advanced etching tool that provides precision wafer fabrication. It is equipped with a sophisticated four-way source alignment machine, 2D-LDE, and a comprehensive vision inspection module. These components allow for efficient and accurate etching of wafers and the detection of etching defects. Additionally, the product has been designed to provide real-time process control and reliable results.