Used LAM RESEARCH A6 9608 PTX #9241406 for sale

LAM RESEARCH A6 9608 PTX is an etcher / asher developed by LAM RESEARCH Corporation for use in advanced semiconductor manufacturing processes. This etcher / asher is designed for high-volume manufacture in semiconductor production lines. It leverages the company's patent-pending thermal plate technology to deliver precise, high-yield etching and ashing results. The equipment has a 20 kW RF generator, efficient transfer, and a high-pressure delivery (up to 760 Torr) for precise ashing and etching processes. The PTX is also equipped with a thermal plate system, which ensures uniform temperature distribution and helps reduce processing time. This etcher / asher features the innovative Hornet reactive-ion etching technology that can process wafers with a thickness ranging from 0.1mm to 0.27mm. It also has an advanced process control unit that features auto alignment and auto focus functions, and an automatic target cassette loader for quick substrate exchange. It is also equipped with an advanced process recipe compiler to simplify the task of developing process recipes. A6 9608 PTX etcher / asher has a maximum capacity of 8-inch wafers, a uniformity of 6500 Angstroms, and a process repeatability of 3.5 sigma. It supports a wide range of wafer substrates such as silicon, quartz, and sapphire, as well as an extensive list of materials for etching and ashing. The machine is also able to process a wide range of PFG precursor gases such as chlorine, nitrogen, and bromine. In addition, this tool is equipped with a PANalytical Quartz Analysis Asset, which provides real-time monitoring and analysis of process performance. The etcher / asher is also compatible with the LAM A9 thermal control model, allowing automatic temperature control of the process chamber. As well as the Ozone Control Equipment, which provides precise control over ozone production to ensure uniform etching or ashing results. LAM RESEARCH A6 9608 PTX is a high-precision etcher / asher that provides excellent process reliability and throughput to semiconductor production lines. This reliable, cost-effective system is ideal for semiconductor device fabrication, package assembly, and other applications.