Used LAM RESEARCH A6 9608 PTX #9410068 for sale

LAM RESEARCH A6 9608 PTX etcher / asher is an industrial-grade plasma etching tool used for precision fabrication of semiconductor and micromachined products. The 9608 PTX features chemical etching, using a reactive gas, combined with etching using a physical form of energy, known as plasma. The tool provides an excellent combination of process control and etching consistency, while achieving high throughput by rapidly transferring material from source wafer to the target wafer. The 9608 PTX's robust design is well-suited for repetitive operations in harsh industrial environments. The system is built with a multi-chamber architecture allowing for a variety of etching processes. It is equipped with three process chambers, a pre-etch chamber, an etch chamber and a post-etch chamber. Each chamber provides numerous etching options and the ability to adjust parameters such as pressure, flow rate and temperature. The recirculating water path ensures temperature maintenance in the etching process, even during long runs. The efficient 9608 PTX system is designed for tight integration of multiple processes into a single etching operation. It includes advanced automation for efficient multi-stage batch operations, with process recipes stored in memory and quickly recalled for future use. The system is equipped with process recipe guidance, real-time monitoring, fault detection, and automatic shut-off features to ensure product quality. Additionally, the tool supports data collection and forward reporting for process improvements and material cost savings. The 9608 PTX is compact and reliable, with a low power consumption. It ensures processes are conducted safely and with no contaminations. For consistent throughput and optimal product quality, LAM RESEARCH offers technical support and product training, plus a comprehensive package of diagnostic tools and predictive maintenance programs. The flexible and easy to maintain tool offers impressive yield industrial performance, enabling process and operation optimization.