Used LAM RESEARCH A6 #293821538 for sale

LAM RESEARCH A6 is a multi-chamber, multi-process etcher/asher that offers fast, reliable etching and ashing capabilities for a variety of applications. A6 is a robust, high-yielding and reliable equipment that is effective for etching large or small substrate sizes. The system consists of two independent, temperature and pressure-controlled process chambers, with a large and spacious processing chamber suitable for larger substrates and multiple smaller chambers for smaller substrates. This allows for variable substrate processing according to the demands of the application. The unit features independently programmable gas flows and pressures, allowing for optimized process flow and fast cycle times on a wide range of materials. Additionally, the machine allows for maximum flexibility in substrate processing with up to four substrate holders per chamber. LAM RESEARCH A6 also includes advanced chamber design characteristics, such as automatic chamber flushing, multi-chamber bypassing, dual blower bypassing, and chamber side wall loading and unloading. Additionally, the availability of both wet and dry processes with A6 allows users to reduce operating costs and increase yields. LAM RESEARCH A6 is also compatible with a wide range of gases, such as CF4, SF6, NF3, and Ar. Finally, A6 has a built-in multi-chamber process optimization feature that makes it highly reliable, efficient and user-friendly.