Used LAM RESEARCH AE 480 #9214116 for sale

LAM RESEARCH AE 480 is an advanced etcher/asher equipment designed to achieve the highest level of process control, accuracy, and wafer throughput. Equipped with powerful etching and baking capabilities, AE 480 can handle a wide range of semiconductor applications such as poly-Si gate etching, source/drain etching, and wafer cleaning. With its fully automated processes and state-of-the-art process control technology, LAM RESEARCH AE 480 helps customers deliver the best quality, yield, and throughput. AE 480 features a 50-wafer load-lock system which provides a unique, efficient, and cost-effective wafer handling and storage solution. It is capable of processing large-size "quarter-cut" wafers (up to 12 inches in diameter) which can be transferred to and from the etcher/asher without any manual intervention. LAM RESEARCH AE 480 also features an advanced realtime process control unit, allowing optimized chamber pressure, voltage, and gas flow to be maintained throughout the process cycle. AE 480 etcher/asher is powered by a flexible, dual-frequency HF source which provides unparalleled etching and baking throughput. Its modular design affords customers the ability to customize their systems to meet their specific manufacturing requirements. Furthermore, its advanced process gases delivery capability helps sustain high etch rate, while its high temperature bake capability ensures maximum uniformity across all wafer layers. LAM RESEARCH AE 480 also provides customers with enhanced serviceability. The machine is designed with an open architecture that can be easily upgraded and configured with third-party components such as robotic and restocking systems, thermal systems, and conveyors. In addition, AE 480 features a customer-friendly networking structure that supports both in-house and remote diagnostics and maintenance. Thanks to the advanced features and robust tool design, LAM RESEARCH AE 480 offers customers unsurpassed performance that will help meet all their semiconductor manufacturing needs. With its unmatched process repeatability, advanced process control, and high-throughput capabilities, AE 480 is the ideal etcher/asher for achieving the highest product quality and yields.