Used LAM RESEARCH Alliance 4720 #9192401 for sale

LAM RESEARCH Alliance 4720 is a highly reliable, fully automated, batch-type, Inductively Coupled Plasma (ICP) reactor for etching and ashing processes. It is a highly controllable, volumetric process equipment ideal for production-type etching and ashing. This system is capable of running several process recipes at a single setting, allowing for precise control of process variables. The unit features a four-capability core that yields superior etching/ashing results. It is designed with a 3-axis mechanical robot arm for precise handling of wafers in a closed environment and an automated wafer handling machine to ensure safe and efficient processing of wafers. Additionally, Alliance 4720 comes with a dynamic gas control tool, a temperature control module, a pressure control module, and a safety interlock asset that prevents improper operation. The model's dynamic gas control equipment enables precise etching/ashing parameters that are necessary to meet today's demanding fabrication requirements. The temperature and pressure control module provides for consistent process heating and pressure control. An opto gas analyzer is also included for real-time continuous monitoring of process gases. LAM RESEARCH Alliance 4720 is supported by the most reliable gas and chemical delivery systems available. It is powered with LAM's advanced communication and controller architecture which allows applications to be modified, controlled, and monitored remotely. It supports both operator interface and automated control. The system also includes standard maintenance alarms for tracking temperature, pressure, and gas flow. This etcher/asher can process up to 6" wafer diameters. Its uniform etching/ashing performance over a wide range of substrates and varying process requirements ensures reliable and repeatable results. Alliance 4720 is also capable of processing cassettes of up to 40 wafers at once, making it suitable for wafer-level production. In addition, the unit is certified and maintained through the LAM Alliance Certified program, guaranteeing the highest quality components available.