Used LAM RESEARCH Alliance 9100 PTX #293754418 for sale
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ID: 293754418
Wafer Size: 8"
Vintage: 2000
Oxide etcher, 8"
Non-functional
Robot: MAG 7 (Dual end effector)
(2) Chambers
Wafer type: Notch, 26 slots
EMO Guard ring
SECS/GEM Interface
TCP9100 Process module
Pendulum throttle valve
VAT 65 Gate valve
65046-PH52-ADE1 VAT Step motor
650PM-36PM-1004 VAT Adaptive pressure controller
Gas panel exhaust flange
Gas Pallet Chamber 1 and 2:
Ar (500 sccm, Analog) FC-780C
O2 (2000 sccm, Analog) FC-780C
C4F8 (50s ccm, Analog) FC-780C
CHF3 (100 sccm, Analog) FC-780C
C5F8 (50 sccm, Analog) FC-780C
CH2F2 (100 sccm, Analog) FC-780C
O2 (30 sccm, Analog) FC-780C
CO (200 sccm, Analog) FC-780C
Power supply: 208 VAC, 60 Hz
2000 vintage.
LAM RESEARCH Alliance 9100 PTX is an etching/ ashing tool designed for next-generation semiconductor processing. With its high power and precision, the 9100 PTX is ideal for complex device fabrication with a wide range of processes. Its superior etch/ash performance, coupled with its advanced, efficient, and reliable processing capabilities, make it the perfect choice for the most demanding device and material processing applications. Alliance 9100 PTX is capable of performing both dry and wet etch/ash operations ranging from fast etching/ashing of dielectrics to ultra-precise processes with selective etching/ashing of metals. It features a high speed extraction/compression process that ensures rapid etch/ash throughput with edge-to-edge uniformity and minimal damage. LAM RESEARCH Alliance 9100 PTX also features an advanced acid suppression system that reduces the etching/ashing cycle times, resulting in increased production efficiency. Alliance 9100 PTX also provides a wide selection of efficient and cost-effective downstream handling options. These include cassette loading, SCARA robot cassette transport system, as well as vertical and/or horizontal single cassette load and unload methods. LAM RESEARCH Alliance 9100 PTX also features fully automated wafer release and unload, eliminating operator effort. This ensures improved throughput performance and increased device yields. Alliance 9100 PTX has an intuitive operator interface which provides all the necessary controls for optimal etch/ash operation. It also has a built-in recipe editing functions for creating advanced recipes, as well as powerful data logging features for accurate data analysis of the etching/ashing results. LAM RESEARCH Alliance 9100 PTX supports modern communication protocols, such as Ethernet, allowing users to easily connect and access etch/ash data from any convenient location. Overall, Alliance 9100 PTX is an advanced etch/ash tool designed for the most demanding device and material processing applications. With its high power, precision, and advanced features, the 9100 PTX provides reliable etching/ashing performance with reduced cycle times and improved device yields.
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