Used LAM RESEARCH Alliance 9400 DSiE #9082559 for sale

LAM RESEARCH Alliance 9400 DSiE is a high-end etcher/asher used in advanced semiconductor production. It is designed for precise, high-precision etching and ashing of both resistive and dielectric materials. It has a modular architecture that allows for customizable operations and pre-installed process recipes for optimal semiconductor production. The 9400 DSiE has a high-temperature, high-performance induction furnace powered by a 25 kW power supply. This induction furnace offers precise temperature control, with a temperature range of 40 to 1700° C. It is also designed for low pressure or vacuum operation, with an evaporator capable of pumping down to pure vacuum. The 9400 DSiE also has an infrared pyrometer for precise temperature measurement. The 9400 DSiE has eight independently-controlled gas valves with digital flowmeter control. It is equipped with a quick-connect manifold and a low-pressure drop, constant-flow distribution system. The 9400 DSiE also has remote pressure monitor capability, allowing for easy control of etching and ashing processes. The 9400 DSiE is equipped with advanced etching and ashing technologies, including Plasma Enhanced Aqueous Etching (PEAE), Ion-Beam Enhanced Etching (IBEE), and Atomic Layer Deposition (ALD). It also supports a wide range of process gases, including chlorine, argon, ammonia, and fluorocarbons. The 9400 DSiE is designed to be compatible with a wide range of wafers, ranging from 200 mm to 450 mm in diameter. Alliance 9400 DSiE combines advanced technology and engineering with reliability and user-friendly operation. It is an ideal choice for advanced etching and ashing processes in semiconductor production. It is extremely reliable, easy to use, and allows for highly detailed and precise etching and ashing operations.