Used LAM RESEARCH Alliance 9400 #9035897 for sale

LAM RESEARCH Alliance 9400 is an advanced etcher / asher designed for precise etching and ashing of semiconductor devices and materials. Processing power and precision are critical for products and technology that often require strict manufacturing tolerances. Alliance 9400 is designed to handle difficult processes with higher throughput, improved control, and reduced cost. LAM RESEARCH Alliance 9400 features advanced multi-zone heated dome and chamber design that maximizes process uniformity and feature profile of advanced device structures. The multi-zone, cascadable dome minimizes temperature differentiation from the center to edge and does not require post-process annealing. The multi-zone chamber design ensures horizontal thermal and plasma uniformity with axial flow through independent vented zones. Alliance 9400 is a cost-effective solution for advanced device structures and processes. Its advanced plasma source technology (APS) ensures greater process flexibility and high performance in each application by providing a large range of configurable parameters. LAM RESEARCH Alliance 9400 also features a unique automated process controller, which allows for flexible recipes that maximize efficiency and minimize waste. The closed-loop process control system monitors process performance and implements feedback control algorithms that ensure accuracy and repeatability. Alliance 9400 provides a safe environment for any etching or ashing process. It has a wide range of safety features such as an automated process control calorimeter, variable temperature operation, a dedicated fire/smoke alarm system, and an automatic safety valve shut-off system. LAM RESEARCH Alliance 9400 is also designed with an integrated exhaust blower, which minimizes the risk of airborne particles and other hazardous particles. In summary, Alliance 9400 is an advanced etcher/asher for precise process applications and is designed for optimal efficiency, cost savings, and safety. It features multi-zone heated dome and chamber designs that maintain the process uniformity and feature profile accuracy, multi-zone chamber that ensures thermal and plasma uniformity in a safe environment, and an automated process controller with flexible recipes for highest performance and minimal waste.