Used LAM RESEARCH Alliance 9600 PTX #293764316 for sale

LAM RESEARCH Alliance 9600 PTX is an etcher/asher for the semiconductor industry. This tool is used for patterning, removing, and doping of a variety of materials from aluminum to silicon and photoresist. It is designed to be used in a variety of production scenarios due to its scalability, flexibility, high throughput, and low cost-of-ownership. The core of Alliance 9600 PTX is its etching and ashing capabilities. The unit is equipped with a dual-stage RFpowered dry etching/ashing system for precise control of the ion beam. This solution is capable of removing layers down to 5 nanometers (nm), with a typical process window of 0.03-10nm. This system is capable of etching metal, oxides, nitrides, polysilicon, and other materials used in the production of semiconductor devices. The machine also includes a high-vacuum-compatible safety shutter to prevent the escape of gas or particles during etching and ashing processes. Other vacuum components, such as a turbo molecular pump, are included for improved etching performance and control. This ensures reproducible etching and ashing processes for a wide range of applications. LAM RESEARCH Alliance 9600 PTX has a powerful but easy to use graphical user interface, which simplifies process setup and monitoring. Its Dual Computer Interface (DCI) integration allows controllers to be located up to 50 meters away from the etch/ash tool, making the machine measurement and adjustment port accessible from a convenient external location. Finally, a load lock option is available, allowing for automated loading of a workpiece into the etching and ashing chamber. The machine allows for integration with production automation systems, allowing processes to be easily automated and monitored with a minimum of effort. In conclusion, Alliance 9600 PTX is a powerful and economical solution for etching and ashing various materials for use in the production of semiconductor devices. Its small footprint, etch/ash capabilities, integrated safety shutter, powerful GUI, and flexibility makes it an ideal tool for any production environment.