Used LAM RESEARCH Alliance 9600 PTX #9299377 for sale

LAM RESEARCH Alliance 9600 PTX is a highly efficient etcher/asher designed specifically for improved processing throughput, smaller footprint, and parallel process capability. This wafer processing equipment is a batch-style system with a wide process window that allows for greater efficiency and versatility. It offers various process chemistry options, including liquid- and gas- based chemistries. The unit features dual load-lock stations, a 8" wafer transport, as well as parallel-processing capability. The primary benefits of this machine include the ability to simplify load locks process, improved cleaning efficiency and repeatability, and the ability to control etching process chemistries with precision. The robust process control and automation make the tool ideal for simultaneous etch and ash processing for improved yield and better repeatability. The asset also features a multi-zone batch control for enhanced through-process monitoring, enabling on-the-fly chemistries and jobs to be changed in real time. Alliance 9600 PTX is a reliable etcher/asher, designed to withstand extreme conditions during processing, and is equipped with high speed CPU, dedicated video model, process control software, full-color touch-panel, and vacuum and pressure monitors. Its modular design makes it highly flexible so that different process modules- including silicide, etch, ash, and other standards- can be configured as required. Moreover, the equipment has the smart CVDTM film deposition technology for real-time control and enhanced uniformity of deposited films on a wafer. LAM RESEARCH Alliance 9600 PTX is equipped with Intelligent Process Monitoring (IPM) technology to continually monitor and control through-process parameters and automatically adjust tool settings, while also ensuring that process steps, including pre-cleaning, etching, and post-emission cleaning, are executed accurately. With a maximum throughput of 300 wafers per hour, this system is ideal for today's wafer processing needs.