Used LAM RESEARCH Alliance 9600 PTX #9389921 for sale
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LAM RESEARCH Alliance 9600 PTX is a high-throughput etcher / asher designed for high-volume and flexible production of semiconductor devices. The 9600 PTX offers remarkably low levels of particle counts and superior uniformity of material removal with an impressive throughput of up to 227 wafers per hour. This equipment provides advanced technology that ensures fast, reliable, and cost effective plasma etching and cleaning operations. The machine consists of an advanced, multi-zone plasma source for precise and flexible etching. An advanced chamber design ensures controlled uniformity in different areas of the wafer, which helps produce highly accurate devices. The equipment includes a Vacuum Pumping System, capable of handling up to 80 Torr, and an Enhanced Coolant Unit that provides optimal cooling of the wafer, electrodes, and thermal transitions. Additionally, Alliance 9600 PTX also includes advanced RF power delivery and control systems. Proprietary Advanced Process Control (APC) algorithms guarantee that the desired etching or cleaning process is achieved quickly and accurately. Variable Process Pressure Control also enables precise chamber pressures to be set and maintained during etching and/or cleaning operations. Overall, with its high level of precision and throughput, LAM RESEARCH Alliance 9600 PTX is a perfect addition to any production line that requires fast, reliable etching and cleaning. Thanks to its simplified design and operation machine, process engineers can program, set, and monitor the etching and cleaning processes accurately and quickly. The machine is also highly configurable, allowing users to adjust its features and operational procedures at any time to ensure consistent results.
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