Used LAM RESEARCH Alliance A4 9400SE #9169592 for sale

LAM RESEARCH Alliance A4 9400SE
ID: 9169592
Wafer Size: 8"
Vintage: 1997
Etcher, 8" 1997 vintage.
LAM RESEARCH Alliance A4 9400SE is a versatile etcher/asher designed to provide a comprehensive range of resources for simultaneous etching/ashing processes. LAM RESEARCH ALLIANCE A4 9400 SE is a single-piece integrated unit that comprises both etching and ashing elements within one platform. This high-performance equipment provides fast etch processing times (up to 15 cm2/min), improved productivity, and high-yield results. Alliance A4 9400SE offers exclusive program features, including an automated and user-friendly touch interface, enriched with all the necessary settings to provide optimum user convenience. The system is complete with a large 24-bit color display with a 15 x 5 inch full-color touch screen for user-friendly operation. ALLIANCE A4 9400 SE utilizes four independent temperature zones for thermal etch processes, with temperature ranges up to 500°C for selective etching and ashing of depositions. An integrated gas flow regulator allows for precise control of gas properties and distribution. A hot wafer lifter provides an automated parameter adjustment based on experiment parameters and the sample set-up. Each component can be tuned individually in multiple orientations to ensure perfect results. Additionally, LAM RESEARCH Alliance A4 9400SE etcher/asher offers process versatility for both wet and dry etching, including the ability to etch a wide variety of materials, such as Silicon, Gallium Nitride (GaN), and Indium phosphide (InP). It also offers improved production efficiencies and yields, with high-resolution channels and low angle lifters for a variety of substrate configurations. LAM RESEARCH ALLIANCE A4 9400 SE etcher/asher offers an exceptionally high Quality of Service (QoS) with excellent safety ratings, and real-time monitoring of unit status and consumables. An integrated automatic alarm machine quickly alerts the operator to any tool malfunctions. Alliance A4 9400SE also includes remote access features and compatibility with the SCADA control systems. Overall, ALLIANCE A4 9400 SE provides a comprehensive etching/ashing solution for a variety of materials, offers high yields and superior precision, while keeping operational costs low. This versatile, easy to use etcher/asher is the ideal choice for high-tech processes.
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