Used LAM RESEARCH Alliance A4 9600SE #293627729 for sale

LAM RESEARCH Alliance A4 9600SE is an advanced etcher/asher specifically designed for high throughput, reliability, and process flexibility. It is capable of processing a wide range of substrates including silicon, III-V semiconductors, glass, metals, and ceramics. LAM RESEARCH ALLIANCE A4 9600 SE features a multi-chamber design that allows for simultaneous etching and ashing of both vertical and horizontal wafers. It is configured with four process chambers including an exclusive ashing station. A unique "turbo" mode accelerates etching and ashing, allows for lower temperature processing, and reduces pressure drifts during processing. In addition, the large capacity process programs enable high throughput, repeatable processing for both small and large volume production. Alliance A4 9600SE is designed to be easy to use, with intuitive operator interfaces and the ability to integrate with multiprocess tools. Additionally, its advanced process monitoring and control features provide detailed process performance feedback and allow manual or automatic tuning of process parameters in line with desired performance results. ALLIANCE A4 9600 SE etcher/asher is highly customizable and offers a variety of process configurations and options, including post etch clean, ion source and source power pulsing, substrate tracking, and process logs. Coupled with safety features designed to protect users and process equipment, LAM RESEARCH Alliance A4 9600SE provides significant advantages for high-volume etching and ashing applications. LAM RESEARCH ALLIANCE A4 9600 SE is an advanced etcher/asher that offers a unique and flexible processing environment to meet the needs of any semiconductor fabrication process. Its multi-chamber design, fast processing speed, intuitive operator interface, and custom configurations make it an ideal choice for advanced processes that require high throughput and reliability.