Used LAM RESEARCH Alliance A4 9600SE #9098137 for sale
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ID: 9098137
Wafer Size: 8"
Vintage: 1995
Transport module, 8"
Wafer configuration: SEMI
VCE Doors: Automatic
VCE Seal: Bellows
VCE Platform: Cassette
Alliance remote AC box
TCU / Pumps remote AC box
Remote UI
Light tower: No
Cool station: No
Pumping configuration: Single
Gas panel: Integrated
Auxiliary equipment:
Chiller & monitor rack
Remote power module (RPM)
Integrated gas box
(4) Pumps
Monitor rack
Turbo control rack
(2) Chillers
AC Power box and other support components
EMO Cable length: Not included
No process modules included
1995 vintage.
LAM RESEARCH Alliance A4 9600SE etcher / asher is a custom-designed machine that features the latest in precision etching and ashing technology. This etcher / asher is capable of producing high-precision parts perfectly suited for demanding manufacturing processes. The A4 9600SE features a unique three-axis design with two large working surfaces that make it well-suited for the most complex etching applications. The machine's design includes an easy-to-use front-loading deck that provides convenient loading and unloading of parts, as well as a dual-stage temperature control system that accurately prevents over- or under-activation of materials. The A4 9600SE's precision and performance are paramount, as it is capable of working with a variety of materials and substrates. The machine is able to etch on both sides of substrates while achieving better quality with less processing time than its predecessors. Additionally, the machine is designed for safety and efficiency, with a number of features that protect users and the equipment from damage. The machine also features automatic recipe-based programming and a built-in automated recipe editor, making it easy to customize settings and programs for optimized etching performance. Other features of the machine include a built-in gas line system which automatically regulates gas flow for machine cleanings and etching processes, and a two-stage high-pressure exhaust system which eliminates hazardous solvents. Overall, LAM RESEARCH ALLIANCE A4 9600 SE etching / ashing machine is intuitive, reliable, and highly capable. With precision and performance that were previously unattainable, Alliance A4 9600SE will continue to lead the way in precision etching application for years to come.
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