Used LAM RESEARCH Alliance A4 #9114097 for sale

LAM RESEARCH Alliance A4 is an advanced etch/ash processing solution. It is the flagship product in LAM RESEARCH 'all-ion' portfolio, to address challenging etch/ash applications. This product is designed to give higher speed and improved uniformity, compared to its predecessors. It is a configurable, in-line system capable of etching and ashing a range of substrates with the highest degree of process control and repeatability. It has a large chamber size, capable of accommodating large substrate sizes, up to 11 inches in diagonal, to enable high throughput production. Alliance A4 is equipped with a high-performance plasma source, capable of generating low-energy plasma even at high source voltage. It enables excellent uniformity across etch/ash processes without compromising on speed or process parameters. Its configurable source design allows for modification of the ion source shape and position to better fit substrates or process requirements. It is well suited to deep etching or high selectivity applications by using its unique "Reactive Ion Etching" feature. This allows for extremely uniform processing in vertical direction using long-range ion control. LAM RESEARCH Alliance A4 also features a wide range of process control and monitoring options, such as endpoint detection, post etch/ash profiling, substrate heating and cooling, a high-resolution ChamberView system, as well as fully integrated process control sequences. It is also capable of processing substrates in both single-wafer and cluster tools for higher productivity. Alliance A4 is designed to maximize yields and increase throughput for the most difficult etch/ash processes. It can be easily integrated with wafer fab automation systems and is designed to run multiple operations with minimal downtime and higher productivity. The system is built with robust materials, enabling premier performance and reliability in all conditions. With these capabilities, LAM RESEARCH Alliance A4 can help customers achieve the highest levels of product and process quality.