Used LAM RESEARCH Alliance A4 #9195948 for sale
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LAM RESEARCH Alliance A4 is an advanced etch/ash equipment designed to meet the challenging demands of semiconductor device manufacturing. Featuring an enclosed platform for dual-sided etching and ashing, Alliance A4 provides fast, precise wafer processing that is both reliable and cost-effective. The system is designed to deliver precise and repeatable results. It features a four-zone etching and ashing chamber with built-in process and performance sensors to ensure optimal etching and ashing quality. LAM RESEARCH Alliance A4 also features a programmable gas reaction element that allows for different gas recipes to be used during the etch/ash process. With this feature, users can tailor the etch/ash process to meet specific semiconductor device design requirements. Alliance A4 includes a robot arm for reliable wafer handling. The arm can be programmed to quickly and accurately transfer wafers into the chamber and move them between the etch/ash zones. The unit also includes an integrated 1-micron granular vacuum oven to aid in ashing. LAM RESEARCH Alliance A4 supports a variety of etch/ash processes, including wet and dry-bench etching and dry ashing. The machine is designed for compatibility with standard laboratory instruments and accessories such as linear and rotational motor stages, mask-cleaning systems, and mask-alignment systems. Additionally, the tool offers integration with specialty hardware such as substrate heating systems, plasma sources, and particle detectors. The asset features a user-friendly interface that allows for easy setup and operation. The model also offers full recipes and recipes step editing, making it easy to customize recipes to meet process requirements. Alliance A4 supports remote monitoring, giving users the ability to view and track wafer processing results in real time. LAM RESEARCH Alliance A4 is a powerful etch/ash equipment designed to meet the demands of semiconductor device manufacturing. With its programmable gas reaction element, robot arm, and intuitive user interface, Alliance A4 provides an efficient and reliable tool for etching and ashing.
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