Used LAM RESEARCH Alliance A6 9100 PTX #9309385 for sale

LAM RESEARCH Alliance A6 9100 PTX is an etcher/asher that can be used in multiple wafer processing applications in semiconductor, MEMS/MOEMS, and optics technologies. The A6 9100 PTX is designed to provide cleaner etching with higher throughput and improved productivity. The system is equipped with a high-speed and reliable pre-treating cassette that has multiple filament options, which allows users to vary the filament target material and size based on the specific application. The A6 9100 PTX is also equipped with two (2) independent load ports to facilitate efficient loading and unloading for larger-scale production. The flexible architecture of the A6 9100 PTX allows for the interchange of multiple process technologies with up to two (2) chambers capable of being configured for either etching or ashing. The A6 9100 PTX system can be loaded with up to 3 substrates for etching and ashing, with the substrate size ranging from 200mm to 300mm. The auto-center capability of the A6 9100 PTX ensures the precise alignment of substrates with substrates holders, reducing the potential for centering deviation errors. Additionally, the A6 9100 PTX is designed to minimize particle generation and is ULPA rated to a minimum of 15 atomic mass units at 0.3 microns. The A6 9100 PTX also integrates an automated 100 hour nitrogen scrubber to enable consistent etch performance over the long term. Additionally, the etching temperature can be precisely controlled and measured to +/- 2°C accuracy. The embedded diagnostic software also allows for extremely precise process control and validation. The A6 9100 PTX includes a built-in user interface for system control and monitoring, which can be accessed directly from the machine's keypad or remotely from a standard web browser. With the integrated user interface, users can easily monitor pressure, mass, temperature, and other critical parameters of the etch and ashing process. The A6 9100 PTX also includes a complete library of recipes for etching different materials and substrates with optimized parameters for achieving the highest quality results. In sum, Alliance A6 9100 PTX is a high-performance etcher/asher that is built with flexibility, efficiency, and quality control in mind. Capable of processing up to 3 substrates with a size range of 200mm - 300mm, the A6 9100 PTX's integrated pre-treating cassette, auto-centering capabilities, and comprehensive user interface make it a dependable and precise tool for etching and ashing.