Used LAM RESEARCH Alliance A6 9400 DFM #121362 for sale
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ID: 121362
Wafer Size: 8"
Vintage: 2004
Poly etcher, 8"
(3) 9400-DFM chambers
Transfer Module Type: A6
VCE Type: A6 API
Aligner: 011-2980-16 (0405-11887)
Robot Type: Magnatran-7
Arm Type: Twin ARM (black finger)
User Interface: CRT monitor, PC, keyboard, light pen, UPS, signal tower
Lid lifter: Air cylinder
Wafer detection system: exist
EMO hub: exist
Cable raceways: exist
PM slot valves: 853-442064-002
Signal Tower: 4 lamps (Red, orange, blue, blue)
PRS gauge-1 (VCE-1): HPS
PRS gauge-1 (VCE-2): HPS
PRS gauge-1 (VCE-3): HPS
PM-2, Gas Module:
Gas Range
CL2 100
HBR 200
O2 10
C2F6 100
SF6 20
SF6 200
O2 200
CF4 50
N2 50
PM-3, Gas Module:
Gas Range
CL2 100
HBR 200
O2 10
C2F6 100
SF6 20
SF6 200
O2 200
CF4 50
N2 50
PM-4, Gas Module:
Gas Range
CL2 100
HBR 200
O2 10
C2F6 100
SF6 20
SF6 200
O2 200
CF4 50
N2 50
2004 vintage.
LAM RESEARCH Alliance A6 9400 DFM is an ideal device for etching and ashing a variety of substrates. This high performance etcher / asher offers the capability to etch and ashy up to nine 1000 mm x 400 mm wafers at once, with an 1800 W RF power supply. Additionally, it boasts a 19" touchscreen display with a modern, user-friendly interface that supports advanced process control. The system has an extra large load/unload pod with an adjustable arm, meaning that substrates can be placed on the device with precision and ease. It also has a powerful RF matching network with adjustable matching, allowing for excellent etching performance even at high frequencies. LAM RESEARCH ALLIANCE A6 9400DFM is equipped with LAM's advanced Dynamic Flow Mode (DFM) etching capability, allowing for precise control of sidewall angles and bottom etching depth. This results in a more complete etch profile with reduced taper and less overetching. This etcher / asher also offers a full suite of gas chemistry processes with flexible gas sequencing, and process profiling options allow for similar performance on different substrate materials. Additionally, the high-flow showerhead array ensures consistent uniformity of etching. The device's chilled recirculating process chamber features a full overpressure capability, making it ideal for vacuum etching/ashing applications. For further convenience, Alliance A6 9400 DFM also offers remote monitoring and process control, allowing users to manage the system remotely and receive detailed process reports. Finally, its enhanced safety features make it compliant with the latest safety guidelines and CE mark regulations. ALLIANCE A6 9400DFM is an impressive etcher/asher that enables users to achieve reliable and consistent etching and ashing results with advanced control and precision. This device's combination of powerful features, user-friendly interface, and process capabilities make it a great choice for those looking to etch or ash a variety of substrates.
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