Used LAM RESEARCH Alliance A6 9400 DFM #9027019 for sale
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ID: 9027019
Poly etcher
Software version: A2.1.1-009
Main body: Alliance 6
Process module 1: Alliance stripper
Process module 2: 9400 DFM
Process module 3: 9400 DFM
Process module 4: Alliance stripper
Monitor rack: Alliance PC and T-box, Japanese type (mm screw)
Chiller: Risshi EX-2004
UPS: Nemic Lambda PS 1210
Turbo pump and controller:
PM-2 turbo pump: Alcatel ATH-1600M
PM-2 controller: Alcatel ATC-1300M/1600M
PM-3 turbo pump: Alcatel ATH-1600M
PM-3 controller: Alcatel ATC-1300M/1600M
Dry pump:
Transfer module: Edwards iQDP80
Loadlock: Edwards iQDP80
PM-1: Edwards iQDP80 / QMB500F
PM-2: Edwards iQDP80
PM-3: Edwards iQDP80
PM-4: Edwards iQDP80 / QMB500
RF generator:
PM-2 top: Advanced Energy RFDS
PM-2 bottom: Advanced Energy RFG1250 Halo
PM-3 top: Advanced Energy RFDS
PM-3 bottom: Advanced Energy RFG1250 Halo
MFC:
PM-1:
Gas 1: AERA, FC-D980C, 02, 5000 SCCM
Gas 2: AERA, FC-D980C, N2, 1000 SCCM
PM-2:
Gas 1: AERA, FC-D980C, Cl2, 200 SCCM
Gas 2: AERA, FC-D980C, HBr, 500 SCCM
Gas 3: AERA, FC-D980C, O2, 10 SCCM
Gas 4: AERA, FC-D980C, He, 200 SCCM
Gas 5: AERA, FC-D980C, SF6, 200 SCCM
Gas 6: AERA, FC-D980C, O2, 200 SCCM
Gas 7: AERA, FC-D980C, CF4, 200 SCCM
Gas 8: AERA, FC-D980C, CHF3, 200 SCCM
PM-3:
Gas 1: AERA, FC-D980C, Cl2, 200 SCCM
Gas 2: AERA, FC-D980C, HBr, 500 SCCM
Gas 3: AERA, FC-D980C, O2, 10 SCCM
Gas 4: AERA, FC-D980C, He, 200 SCCM
Gas 5: AERA, FC-D980C, SF6, 200 SCCM
Gas 6: AERA, FC-D980C, O2, 200 SCCM
Gas 7: AERA, FC-D980C, CF4, 200 SCCM
Gas 8: AERA, FC-D980C, CHF3, 200 SCCM
PM-4:
Gas 1: SAM, SFC480E, O2, 5000 SCCM
Gas 2: AERA, FC-D980C, N2, 1000 SCCM
2001 vintage.
LAM RESEARCH Alliance A6 9400 DFM etcher/asher is an advanced etch process tool used for applying thin-film patterns of materials such as metals, glasses, dielectric materials, or photoresists. It allows for patterned deposition and etching of any material or substrate over a wide range of specific processes. LAM RESEARCH ALLIANCE A6 9400DFM uses direct-write electron beam lithography, reactive ion etching (RIE), visual inspection, vacuum thermal cluster (VTC) processing, and flame treatment technology for the etching and deposition process of products. The tool works by focusing an electron beam onto the material to be patterned. This causes the material to be melted in many very small areas, resulting in a pattern of droplets. After this, a chemical etching process occurs that causes the droplets to spread out over the material, creating a pattern of nanometer-sized features. After the pattern is created, the reactive ion etching (RIE) process is used to further refine and clean the pattern. This involves using an electric field to propel reactive ions at the substrate material, removing highly localized spots, which are then cleaned up through the use of further type of vacuum processing, flame treatment, and visual inspection. Alliance A6 9400 DFM is an extremely precise etcher/asher that is built for optimal performance and control. It is capable of producing patterns down to 10 nanometers, and is used in a wide range of industries such as semiconductor manufacturing, MEMS production, and thin-film deposition. The tool is also capable of supporting specialty processes such as biasing, micromachining, densification, and nanowire forming, making it an ideal choice for a variety of complex jobs. ALLIANCE A6 9400DFM is equipped with an image correction system, enabling precise ballistic delithiation and resolution of features as small as one nanometer. The tool also includes a variety of advanced features such as an automated reticle program, vacuum thermal cluster (VTC) processing, and in-situ PC-based algorithm control. LAM RESEARCH Alliance A6 9400 DFM is extremely user-friendly and its intuitive programming interface makes it easy to operate and modify the etching processes. LAM RESEARCH ALLIANCE A6 9400DFM etcher/asher is an advanced, precise tool used for applying precise thin-film patterns onto various materials. Its capabilities and advanced features make it an ideal choice for private or commercial applications in the microelectronics, semiconductor, and MEMS industries. Alliance A6 9400 DFM etcher/asher is an extremely user-friendly tool whose intuitive programming interface and advanced features make the etching process more efficient and accurate.
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