Used LAM RESEARCH Alliance A6 9400 #9038352 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

ID: 9038352
Etcher, 8" Alliance A6 platform (3) 9400PTX chambers Bulkhead configuration CE mark Pre-aligner MKS transducer Magnatran 7 robot Signal Tower Remote Operator Interface EP filter box; 405 + 520nm ESC VAT isolation valve 12" TCP coil Dual end effector SEIKO SEIKI-STP-A2203C AERA FC D980C MFCs Stacked gas boxes 12 gas lines per box TopRF generator: RFDS Bottom RF Generator: RFG1250HOLA (3) TCS DEX-30AGRF chiller Generator, Turbo Pump Controller, Main Controller Alliance transport module maintenance manual Alliance transport module ship with integration Drawings and schematics revision B Alliance integration gas box drawings and schematics Alliance SECS/GEM interface revision F Vacuum pumps and exhaust scrubber not included.
LAM RESEARCH Alliance A6 9400 is an etcher / asher, a type of sputter deposition equipment. The system uses capacitively coupled radio frequency (RF) power to sputter thin layers of metal onto a substrate. Alliance A6 9400 is a high-throughput unit capable of producing uniform film coatings at high rates. The machine is a two-chamber configuration, with an RF power supply, an inert plasma, and a vacuum chamber. The etcher chamber houses the RF electrodes, which are connected to the RF power supply. The RF power in the chamber is controlled by the power supply and adjusted to the desired etching parameters as per the desired etching process. The inert plasma is activated in the chamber and is used to activate the metal ions in the reactive gases. The materials are sputtered onto the substrate as a result of ion bombardment, and the RF power is adjusted to promote uniform deposition of the sputtered metal film. The vacuum chamber provides an environment for the deposition process at low pressure, and the two chambers are linked to maintain a pressure differential between the etching and the vacuum chamber. LAM RESEARCH Alliance A6 9400 is equipped with an advanced multi-sensor imaging tool to monitor the growth of the film during the etching process. The images taken can be used for process monitoring and troubleshooting, as well as providing a visual display of the uniformity of the coating. The asset is also equipped with an open loop process control to provide feedback of the etch rate and uniformity of the coating. Alliance A6 9400 is an adaptable, high-throughput etching / asher capable of producing films with superb performance. Its advanced two-chamber design, open-loop process control, and imaging model provide the user with the ability to precisely control the deposition process and yield desired results.
There are no reviews yet