Used LAM RESEARCH Alliance A6 9600 PTX #9025958 for sale

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ID: 9025958
Etcher (2) Strip modules.
LAM RESEARCH Alliance A6 9600 PTX is an etcher / asher equipment that utilizes high-density plasma technology to enable precise, repeatable control of etch process chemistry. This etcher / asher is designed to provide fast, efficient, and precise etching of a wide variety of materials, such as silicon, germanium, GaAs, SiO2, SiGe, and other compound semiconductors, as well as hard substrates such as metals, ceramics, and polymers. LAM RESEARCH ALLIANCE A6-9600PTX is also equipped with a micrometer-level resolution scanning system capable of scan rate speeds of 25kHz. This high-speed scanning unit is designed to allow variable etch depths, angles, and widths with high levels of accuracy and repeatability, making it especially useful for high aspect ratio precision etch applications. Further, ALLIANCE A6 9600PTX is designed with a sophisticated hazard control machine to protect both personnel and the device itself. It is equipped with gas shut-off sensors, an inert purge gas delivery tool, and pressure controller, to ensure safe, clean operation. ALLIANCE A6-9600PTX also comes with a variable-temperature gas transport asset, designed to allow a broader range of etch chemistries to be utilized. Alliance A6 9600 PTX is specifically designed to enable efficient ashing without the need for multiple process steps. The asher utilizes a high-density plasma to ensure uniform etch rates across surfaces and eliminate any deformation during the ashing process. This model also utilizes an integrated plasma-feedback control equipment, which ensures precise control of etch rates and process repeatability. Due to its compact size, LAM RESEARCH ALLIANCE A6 9600PTX is an ideal choice for laboratory environments, and it is designed to be efficient and straightforward to operate. The etcher / asher system comes with an intuitive user interface, allowing users to quickly set up and modify parameters as needed. All of these features combine to make LAM RESEARCH Alliance A6 9600 PTX an excellent choice for cost-effective and efficient etch and ashing.
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