Used LAM RESEARCH Alliance A6 9600 #9104047 for sale
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LAM RESEARCH Alliance A6 9600 is an advanced etcher/asher equipment, designed to provide superior performance for highly specialized applications. It is equipped with a vacuum system for improved etching capability, as well as an RF RF power supply for advanced physical vapor deposition applications. The A6 9600 also features an advanced user interface, allowing for easy handling and reliable operation. At the core of the A6 9600 is the powerful multi-beam electron beam lithography (MEBL) systems. This unit consists of several pairs of electron beam columns, which are capable of creating high-resolution patterns at an impressive speed. It features an invar-mesh shutter that helps increase accuracy and provides superior pattern fidelity. Additionally, it is equipped with cutting-edge beam deflection capabilities and advanced masking capability that enable faster processing. Alliance A6 9600 is also well-equipped for precision etching applications, with a process chamber that provides for excellent process control and precision etch rate. It is also capable of producing etch patterns that may contain extremely fine feature sizes. Additional features such as edge bias control, multi-channel/channel bar controller, and temperature control also contribute to an improvement in etching performance. The A6 9600 also includes multiple technologies for physical vapor deposition, including high-pressure argon ion evaporation, and sputter coating. These technologies are used to coat a variety of substrates, including metals and a variety of dielectrics, to create complex multi-layer structures without the use of photolithography processes. Additionally, the machine is equipped with an advanced RF RF power supply, offering compatibility with a wide range of materials and gas versions. LAM RESEARCH Alliance A6 9600 is an advanced and reliable etcher/asher tool, designed to handle the most demanding applications in a variety of industries. It is equipped with powerful MEBL systems and a variety of deposition and etching technologies, making it an excellent choice for high-precision microfabrication projects. Furthermore, the advanced user interface allows for easier operation and data analysis, empowering users with exact control through a single machine.
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