Used LAM RESEARCH Alliance A6 9600 #9354470 for sale
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ID: 9354470
Wafer Size: 8"
Etcher, 8"
Install type: Through the wall
Integrated gas panel
No SMIF
PM 1: Microwave
PM 2: 9600 PTX
PM 3: 9600PTX
PM 4: Microwave
PM 5: Aligner
PM 6: Cool station
Electrostatic chuck
On process turbo pump channels
VAT65 Turbo gate valve
Endpoint detection system
Photodiode endpoint
End point 1 P/N: 853-540066-011
CD Rom manuals
Alliance mainframe:
MAG7 Robot
Dual blade
Rotational VCE6 with dynamic seal
Signal lamp tower
Gate valve: Heated (PM2, PM3)
Turbo pump (PM2 and PM3):
SEIKO SEIKI H1303CV3 Turbo pump
RF / Microwave generator:
MKS CPS PM 1 Top
ADVANCED ENERGY RFG 1250 PM 2 Top
ADVANCED ENERGY RFG1250 HALO PM 2 Bottom
ADVANCED ENERGY RFG 1250 PM 3 Top
ADVANCED ENERGY RFG 1250 HALOPM 3 Bottom
MKS CPS PM 4 Top
Chiller:
One/Two cooling channels
Quantity: Up to 4
Gas box configuration:
PM1:
Gas line / Make / Model / Flow (SCCM) / Gas
1 / TYLAN / FC-2950MEP5 / 1000 / N2
3 / TYLAN / FC-2950MEP5 / 5000 / O2
PM2:
Gas line / Make / Model / Flow (SCCM) / Gas
1 / STEC / - / - / BCL3
2 / STEC / - / - / CL2
3 / TYLAN / FC-2950MEP5 / 200 / N2
4 / TYLAN / FC-2950MEP5 / 200 / O2
5 / TYLAN / FC-2950MEP5 / 100 / CHF3
6 / TYLAN / FC-2950MEP5 / 50 / AR
PM3:
Gas line / Make / Model / Flow (SCCM) / Gas
1 / TYLAN / FC-2900MEP5 / 200 / BCL3
2 / TYLAN / FC-2900MEP5 / 200 / CL2
3 / TYLAN / FC-2900MEP5 / 200 / N2
4 / TYLAN / FC-2900M / 200 / O2
5 / TYLAN / FC-2950MEP5 / 100 / CHF3
6 / TYLAN / FC-2950MEP5 / 50 / AR
PM4:
Gas line / Make / Model / Flow (SCCM) / Gas
1 / TYLAN / FC-2950MEP5 / 1000 / N2
3 / TYLAN / FC-2950MEP5 / 5000 / O2
No standard manuals.
LAM RESEARCH Alliance A6 9600 is a fully automated rapid thermal processing equipment based on advanced technologies, designed to provide its users with maximum precision and efficiency. The system operates within a temperature range of 25°C to 900°C and offers excellent temperature uniformity of +/- 5°C, meaning that the environment inside the processing chamber remains consistent while heating up and cooling down. The temperature stability ensures optimal etching or ashing performance at any temperature and substrate combination. The unit is equipped with an intuitive embedded control machine that offers a flexible recipe control, allowing for the integration of atmospheric, heating rate, cooling, end point correction and many other process parameters. This control tool is also capable of dynamic adjustments of these process parameters if required. The asset is capable of processing up to 6 substrates at one time with a process chamber size of 100mm diameter and a substrate size of 8" or 12", giving it higher throughput capacity. The Chamber is designed to perform etching and oxidation processes and it is also equipped with a quartz window viewer so that users can clearly view the progress of their work without having to open the chamber cover. Alliance A6 9600 rapid thermal processing model is an ideal solution for users looking to achieve precise temperature stability and achieve maximum efficiency and performance when processing their substrates.
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