Used LAM RESEARCH Alliance A6 TCP 9408 PTX #9213369 for sale

LAM RESEARCH Alliance A6 TCP 9408 PTX is a high-precision, automated etcher/asher designed for mass production semiconductor fabrication facilities. This machine is engineered to enable high throughput of wafers by optimizing the handling, introduction, coating, and etching process. The overall equipment includes an individual controlling unit with integrated asher and heating/cooling capabilities. The Control Unit contains a programmable logic controller for precise process control, a electromechanical valve, a gas panel for introducing and managing reactive and process gases, and a high-speed lifting system. The individual asher consists of a platform situated on a lift carried by an X-axis staging unit. The lift moves the platform vertically and the X-Axis staging machine moves the platform across the entire process chamber. The Alliance A6 TCP 9408 features several advanced process control technologies, such as LAM RESEARCH EECO-GATE Precision Tuning Tool, pilot asher a3, and the Auto-Pilot Asher process software. The EECO-GATE asset optimizes the RF power to enable repeatable and repeat-able repeat of the etching process. The pilot Asher a3 model is capable of fully independent control of process parameters, making sure that the etching process is repeatable and repeatable repeatable for each wafer. The Auto-Pilot Asher process software plays an important role in the process control, enabling process process automation such as automatic corrections in the RF power, etching rate, flow rate, and other process variables. The Alliance A6 TCP 9408 also contains an integrated cooling/heating equipment, which enables precise temperature control of the process zone, ensuring that the etching process is done within the required temperature range. The machine also contains an electrode replacement system, which allows for quick substitution of electrodes for different jobs and different wafers without manual intervention. In addition, the Alliance A6 TCP 9408 is equipped with several safety features, including a safety interlock unit, a fire suppression machine, and an emergency shut-off valve tool. The machine's filter asset is designed to protect the process environment from contamination. In summary, Alliance A6 TCP 9408 PTX is a powerful etcher/asher engineered to enable seamless, repeatable and repeatable repeat of wafer processes. The machine is equipped with several advanced process control technologies and safety features, making it a reliable choice for mass production semiconductor fabrication needs.