Used LAM RESEARCH Alliance A6 #9123023 for sale

LAM RESEARCH Alliance A6
ID: 9123023
Transfer module.
LAM RESEARCH Alliance A6 is a precision etching and ashing equipment, designed for the most demanding etch and ashing applications. Alliance A6 is capable of superior performance across a number of etching and ashing applications. It is equipped with advanced, high-end features that make it the perfect tool for nanoscale device fabrication and MEMS prototyping. LAM RESEARCH Alliance A6 provides very accurate plasma generation and control on the same platform, enabling users to achieve tight plasma parameter stability and a wide range of etching and ashing results. The system is capable of sub-micron etching as well as high-resolution ion beam etching and ashing operations. This is made possible through advanced etching and ashing recipe capabilities and real-time plasma monitoring systems. Alliance A6 is built with a state-of-the-art, high-throughput DC magnetron sputtering source. This ensures very high etching and ashing rates at the same time, in order to work with multiple sample substrates. The unit also offers a clear view of the process with the option of a laser interferometer for dynamic feedback control. This ensures that all parts of the sample have even etching/ashing properties. To ensure the best possible results, LAM RESEARCH Alliance A6 also has a reliable for safety and environmental compliance. It is fully compliant with semiconductor industry and cleanroom air quality standards. This protects the integrity of the sample from contamination, harmonic noise and other environmental factors that could affect the process. Additionally, it includes a decontamination machine, to ensure that no chemical residues linger on the sample post-etching. Overall, Alliance A6 is an ideal choice for etching and ashing on multiple substrate types, providing excellent process control and results. Its high-end features make it suitable for a variety of nanoscale device fabrication and MEMS prototyping applications.
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