Used LAM RESEARCH Alliance TCP 9400 PTX #293793431 for sale

LAM RESEARCH Alliance TCP 9400 PTX is an etcher/asher provides high throughput and throughput consistency. It is used for etching and ashing of both ceramic and metal substrates. It provides high-precision results with its programmable, repeatable processes and self-monitoring performance. The equipment runs on a touch screen color controller, and offers control resolution up to 0.05 seconds of step time for precise etching and ashing durations. This etching/ashing system offers a high throughput of approximately 400 substrates per hour, and is designed to be compliant with cleanroom protocols. The TCP 9400 PTX asher contains an air cooled, low-pressure reactant chamber, process gas module, and temperature and vacuum controls. The unit also provides a tri-gas etching capability for silicon configurations. It is equipped with a filtering machine to ensure particle control and particle deposition prevention. The tool provides an efficient process by using an advanced reactor chimney design. This helps minimize gas diffusion and facilitate fast etching times. The asset also offers precise etching control, improved uniformity, and excellent repeatability from batch to batch. The TCP 9400 PTX model includes several safety features to ensure a safe operating environment. The equipment also offers self-diagnostic features to detect any external tampering. Additionally, the system includes a low maintenance design to minimize downtime. The stainless steel alloy material ensures low gassing, low-leak concentration, and prevents contamination on the substrates. The unit is capable of producing high-quality results with a broad range of substrates, and is capable of meeting the needs of various production processes. The elastomeric seal ensures precision and accuracy, while the chamber design provides repeatability of results and fast process times. Additionally, the advanced process monitoring machine minimizes errors and enables lower etching times. Overall, Alliance TCP 9400 PTX is an ideal etcher/asher for various production lines and high-volume production needs. The tool's high throughput, precise control of etching, and safety features make it the perfect solution for high-precision etching and ashing applications.