Used LAM RESEARCH Alliance TCP 9600 #9255329 for sale

LAM RESEARCH Alliance TCP 9600 etcher/asher is a multi-functional machine specifically designed for the deposition and etching of films, along with the associated cleaning, physical vapor deposition, and lithography processes required for the fabrication of semiconductor devices. This machine offers a wide range of etching capabilities and several applications, such as MEMS devices, compound semiconductor devices, and microelectronic devices. Alliance TCP 9600 etcher/asher is equipped with a high-capacity, 14" long vacuum chamber, capable of accepting substrates up to 4" x 4" in size. This chamber is heated via a chlorine- and oxygen-containing plasma, produced by an electron cyclotron resonance (ECR) source. The plasma energy then allows for extremely precise etching of deposited layers, such as polysilicon, epitaxy, amorphous silicon, and other materials. The etcher/asher also includes an RF bias generator and a Honeywell pressure regulator, permitting a precise combination of plasma power and pressure for high-quality etching. LAM RESEARCH Alliance TCP 9600 also offers two in situ ion mass spectrometers, which allow for real time monitoring of the etching process, providing important information on etching rates and etch uniformity. By monitoring etching rates and uniformity, manufacturers are able to produce more precise etch results, reducing process variability and ultimately improving product quality. Furthermore, the in-situ ion mass spectrometers allow for the easy integration of additional etch recipes, allowing for etching of new materials with minimal downtime. Alliance TCP 9600 is equipped with a powerful, user-friendly Windows®-compatible software suite, easily allowing for the setup and execution of etch recipes. This software includes data analysis capabilities, allowing for the easy tracking of usage data and etching results, helping manufacturers to produce high-quality results more quickly and efficiently. All in all, LAM RESEARCH Alliance TCP 9600 etcher/asher is a highly capable machine, offering high-quality etching, a powerful software suite, and real-time monitoring for high-precision, reliable etching processes. This machine is ideal for manufacturers who need an etcher/asher with highly precise etching and accurate monitoring capabilities, with minimal downtime.