Used LAM RESEARCH Alliance6 9400 DFM #9412055 for sale

LAM RESEARCH Alliance6 9400 DFM is a production-scale etched wafer fabrication module designed for high-volume, high-throughput wafer processing in the semiconductor industry. Alliance6 9400 DFM is a dedicated etching module specifically designed for advanced high-aspect-ratio wafer processing. The Module is equipped with a 3-axis automated wafer handling equipment and a high-precision multi-zone platen stage. The design of the system makes it suitable for a variety of etching applications such as reactive ion etching (RIE), inductively coupled plasma (ICP) etching, and deep reactive ion etching (DRIE). LAM RESEARCH Alliance6 9400 DFM uses a high-precision multi-zone platen stage to achieve precise wafer alignment and to facilitate batch etching and wafer-to-wafer alignment. The platen is capable of operating in multi-zone mode, allowing for multiple etchings of different types on a wafer simultaneously. The advanced wafer handling unit with its high speed, accuracy, and reliability further enhances the performance and operational flexibility of Alliance6 9400 DFM. The machine also features real-time process control, yield and run-time monitoring, datalogging, advanced fault-tolerant software, and both in-line and off-line defect inspection. LAM RESEARCH Alliance6 9400 DFM is backed by LAM RESEARCH comprehensive service and support network, including remote service and preventive maintenance programs. The tool provides a reliable and consistent performance by utilizing the highest quality materials and manufacturing techniques. It is designed to optimize throughput and yield, enabling customers to maximize cost savings and competitiveness. Its advanced process capabilities, flexible operational modes, and reliable performance make Alliance6 9400 DFM a reliable solution for a wide range of semiconductor fabrication requirements.