Used LAM RESEARCH Autoetch 480 #293652620 for sale

LAM RESEARCH Autoetch 480 is an etcher/asher designed for wafer processing. It enables high throughput, robust etching and ashing for a variety of applications. Using multi-chamber technology, Autoetch 480 combines etching and ashing in a single tool. Features include independent mass flow controllers for each chamber, digital pressure control for etch/ash selectivity, and integral load/unload automation for improved productivity. LAM RESEARCH Autoetch 480 has been designed with modular chambers to maximize process flexibility. This allows customers to tailor their etch or ashing process to a specific set of requirements. The etching capabilities include: plasma etch, wet etch and combined wet/dry etch processes. The ashing capabilities include: oxygen plasma, remote plasma, wet etch and combined wet/dry etch processes. All processes are available with up to three chambers. Autoetch 480 also features advanced process control technology that ensures optimal process repeatability and yield. It offers an easy-to-use recipe programming system that simplifies control and minimizes downtime. The tool maintains a comprehensive process audit trail, with clear traceability from the operator to the process used. LAM RESEARCH Autoetch 480 comes with a variety of options and upgrades to increase versatility. This includes rapid thermal processing, a wide range of chambers, integrated particle controls and recipe programming interface. The Autoetch also provides integration-ready software modules, including real-time metrology, online monitoring and control, and process-data reporting. Autoetch 480 is an advanced etcher/asher that can help users maximize yield and process repeatability. Its modular design provides flexibility and allows the tool to be tailored to specific requirements. Its control technology ensures optimal process repeatability and yield and its integrated software modules provide real-time monitoring and control. LAM RESEARCH Autoetch 480 is an ideal solution for customers looking to upgrade their etching process.