Used LAM RESEARCH Autoetch 490 #293652631 for sale
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ID: 293652631
Wafer Size: 6"
Etcher, 6"
Process: Oxide etch
Can be setup to run: 3" to 6"
Single-wafer process
Automated microprocessor
Cassette-to-cassette wafer process
Vacuum load locked
Programmable
Variable electrode spacing
Endpoint detection
ENI OEM-6 RF Generator
Edward vacuum pump
M and W Flowrite chiller.
LAM RESEARCH Autoetch 490 is an etching and ashing equipment that offers high-precision, programmable control of chemical processes and temperature. This system is capable of taking on a variety of etching and ashing tasks with varying temperature and etchant requirements. Autoetch 490 utilizes independent, automatic, computerized control systems for both temperature and logic functions, which allow for complex etching and ashing scenarios with complete flexibility. LAM RESEARCH Autoetch 490 is a premium tools unit with an intuitive graphical user interface and advanced process control. It has a built-in 12-inch color display, allowing users to clearly see the etching and ashing operations, as well as view and adjust recipe parameters quickly and easily. It also auto-calibrates the temperature of each chamber and maintains temperature consistency throughout the process, allowing for uniform quality of etched components. The machine additionally has a timer sequence feature to enable precise, consistent control of etching time. This timer can also be utilized in conjunction with the built-in limit controllers to ensure protection of delicate substrates and components. Autoetch 490 is powered by an internal compressed air supply to drive two independent vacuum pumps for precise etching, ashing, and cleaning operations. It utilizes E-beam and UV exposure technologies to facilitate die-to-die, web and reel-to-reel processes. The tool also has several cleaning capability to improve process reliability and quality assurance. These cleaning functions, which include a wet clean process and a reactive gas clean process, help reduce cycle times and enable LAM RESEARCH Autoetch 490 to be an effective tool for achieving high-purity etching and ashing results. The high-Precision nozzle adjustment feature also ensures consistency when dealing with large substrates, which is essential for repeatable product quality. In short, Autoetch 490 is a powerful etching and ashing asset that delivers superior quality results. With its user-friendly graphical interface, advanced process control, independent temperature control, integrated timer and limit controllers, efficient cleaning capabilities, and precise nozzle adjustments, LAM RESEARCH Autoetch 490 is an ideal tool for any etching and ashing application.
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