Used LAM RESEARCH Autoetch 490 #293728169 for sale

LAM RESEARCH Autoetch 490 is an advanced etching and ashing equipment designed for high-precision fabrication of semiconductor devices. It utilizes a variety of etching and ashing technology, including integrated plasma etching, inductively coupled plasma etching, and reactive ion etching processes. Autoetch 490 system is configured with a fully enclosed chamber that provides a clean process environment and allows the unit to adhere to tight process repeatability and recipe control requirements. Plasma energy is precisely controlled to ensure that etching processes are highly repeatable. LAM RESEARCH Autoetch 490 can precisely etch complex structures and create unique geometry shapes with high aspect ratios. Autoetch 490 includes a factory-installed robot wafer handler machine, which enables automated wafer handling and load port operations. The robot handler tool offers high throughput and short cycle times, and has a dynamically reconfigurable conveyer asset for multiple wafer sizes. LAM RESEARCH Autoetch 490 also features a wafer temperature control model to ensure optimal etching performance. The equipment can be equipped with a wide range of etching recipes, including high-aspect ratio trenches, complex vias, and through-holes and deeper profiles. Autoetch 490 also enables quick and easy recipe modification, recipe parameter adjustments, and process monitoring. The system also features an integrated high resolution video process monitor for real-time process monitoring. LAM RESEARCH Autoetch 490 also offers comprehensive diagnostics, alarm, and recipe management software to maintain process control. The remote diagnostic and monitoring software enables remote process performance monitoring and control. Autoetch 490 also provides users with a variety of options for process automation, including on-board recipe management, non-contact spark detection unit, automatic setup files, and autorun capability. Overall, LAM RESEARCH Autoetch 490 is an advanced etching and ashing machine that offers high-accuracy, repeatable etching processes. The tool includes a robot wafer handler asset and various process control options, and is ideal for fabrication of semiconductor devices.