Used LAM RESEARCH Autoetch 490 #293815927 for sale

LAM RESEARCH Autoetch 490 is an advanced etching and ashing equipment designed to meet the needs of a variety of semiconductor device applications. The system is designed to provide etching, stripping, stripping and photoresist removal, and wafer surface conditioning in one convenient platform. Autoetch 490 is capable of processing both flat and irregularly shaped substrates. Its unique design allows for multiple etching recipes, allowing for flexibility and a broad range of capabilities. LAM RESEARCH Autoetch 490 is composed of a number of subsystems that provide the flexibility needed for processing a variety of substrates. These systems include: a load/unload unit, a gas control machine, a gas delivery tool, a substrate holder, and an etch chamber. The load/unload asset is used to move substrates into and out of the etch chamber. The gas control model is used to regulate the flow of etching gasses. The gas delivery equipment is responsible for delivering the etching gasses to the etch chamber. The substrate holder holds the substrates in the etch chamber during processing, while the etch chamber itself is designed to ensure uniform etching of the substrate. Autoetch 490 is equipped with advanced safety functions such as a vacuum interlock system and an emergency shut-off switch. It also includes an automated recipe control unit that provides operators with the option to store frequently used recipes and manage the machine more efficiently. Additionally, it has a large 21-inch color display that allows operators to monitor the etching process and make adjustments as needed. LAM RESEARCH Autoetch 490 is capable of etching wafers at speeds up to 400 mm/min, with up to 8 etching recipes per substrate batch. This makes it suitable for a wide range of production needs. It is also compatible with a variety of etching gasses, making it suitable for complex processes such as reactive ion etching, deep reactive ion etching, and others. Autoetch 490 is an advanced, high-end etching and ashing tool designed to meet the needs of a variety of semiconductor device applications. It is capable of fast and reliable wafer etching and is designed with the safety and ease-of-use of operators in mind. The asset's advanced features and capability make it an ideal choice for complex etching and ashing processes and a valuable addition to any production facility.