Used LAM RESEARCH Autoetch 490 #293821360 for sale

LAM RESEARCH Autoetch 490 is a fully automated gas etchant and asher. It is designed for semiconductor manufacturing processes and can be used to chemically etch various materials including metals, silicides, oxides and nitrides. It has a variety of features and benefits that make it an invaluable resource in many semiconductor production processes. Autoetch 490 is a programmable etch equipment that includes two independent one-armed, fully-plenum, non-contact/mechanical swivel-divert ashers for etching sequential materials. It also has five individual gas lines for controllable material etch recipes. The etcher has a factory-installed purge system for completely evacuating all gas lines, providing a high degree of safety and process control. LAM RESEARCH Autoetch 490 features a nitrogen bubbler to remove free base gases from the etch chamber. The nitrogen bubbler also includes an in-line filtration unit and wet scrubbing technology to remove all particulates from the etched material. The wet scrubbing technology also assists in providing a clean and dust-free work environment. Autoetch 490 is designed to handle a wide range of ashing and etching operations. The machine can accommodate up to 14 different recipes of gas sequences, providing the end user with a wide range of options for etching various types of materials. There is also an auto-start feature that will start the etching cycle based on a given time cycle, allowing the end user to set the desired etch recipe time. LAM RESEARCH Autoetch 490 is a compact and robust tool that features a small footprint and is easy to integrate with existing equipment. This makes it an ideal solution for tight, space-constrained production areas. In conclusion, Autoetch 490 is an extremely powerful and flexible gas etchant and asher. It has unique features and benefits that make it ideal for semiconductor manufacturing processes. It is fully automated, easy to operate and requires minimal maintenance.