Used LAM RESEARCH Autoetch 590 #293745368 for sale

LAM RESEARCH Autoetch 590 is an etcher and asher designed to provide the highest level of flexibility to accommodate the wide range of semiconductor processes. It is a fully automated equipment that can process from 200mm wafers up to 300mm wafers with a speed of up to 30 wafers per hour. It provides a wide range of process parameters which allow for precise control of process conditions. Autoetch 590 is equipped with dual reaction chambers to ensure good uniformity and increase process efficiency. It is capable of dry etching processes such as RIE, ICP, plasma oxide etching, etch passivation, and post-deposition cleanup. It is also capable of wet etching processes, such as aqueous based etching, photoresist removal, acid etching, alkaline and solution based etching. LAM RESEARCH Autoetch 590 is integrated with a flexible gas delivery system which is capable of supplying both a single process gas and a combination of mixed gases, depending on the type of process being conducted. Autoetch 590 is designed with a particle management unit that helps reduce particle contamination and extends the lifespan of the tool. The automatic wafer handling, which is integrated with the machine, can handle up to three cassette slots that allows a significantly higher throughput, minimizing downtime. LAM RESEARCH Autoetch 590 also features an advanced software and monitoring machine, which is designed to provide complete process control. It includes process monitoring and data logging, providing essential information about the performance of the tool. Additionally, Autoetch 590 is designed with built-in diagnostic and control capabilities that allow it to be integrated into a larger tool. LAM RESEARCH Autoetch 590 is a cost effective solution for semiconductor manufacturers because of its high level of process flexibility and advanced functionality. It is designed and built for high throughput and reliability and is the ideal tool for semiconductor etching and ashing.