Used LAM RESEARCH Autoetch 590 #293754142 for sale

LAM 590 is a state-of-the-art high-performance etcher / asher developed by LAM Research Corporation. It is a fully automated, programmable batch etching equipment based on reactive ion etching (RIE) and plasma ashing (PA) technology. It is capable of a wide range of etching processes and offers exceptional performance, accuracy, and productivity. 590 is designed to handle virtually any etch or ash process requires. It offers precise control of etching or ash parameters such as pressure, RF power, flow rate, and submergence. The system supports a large process chamber of up to 40 inches in diameter to accommodate a full range of wafer sizes. The cassette-to-cassette handling capability of the unit allows it to operate in batches, reducing overall processing time and cost. The etcher / asher is equipped with a wide range of options to ensure precise process control and accuracy. These include a manual load lock and unload station, an automated height detection machine, digital temperature control systems, and an RF generator control module. These features allow precise control of the etch or ash process, assuring that the wafers are reliably and accurately processed every time. The robust electrical and mechanical components of the tool enable it to withstand high voltages and aggressive chemistries, ensuring a long service life even in demanding applications. It comes with a high-resolution gas panel for precise gas control and an optical pyrometer for automatic temperature monitoring. The automated mechanical handling of the asset ensures an efficient loading and unloading process. LAM 590 is UL-, CSA-, and CE-certified, so it is safe to use in most hazardous locations. It provides excellent process control and precision, making it an ideal choice for etching and ashing applications. The model is also easy to use and cost-effective. With its excellent performance and accuracy, it is the perfect choice for any etch or ash process.