Used LAM RESEARCH Autoetch 590 #293811811 for sale

LAM RESEARCH Autoetch 590 is an etcher and asher designed for a variety of applications. It is capable of processing materials ranging from metals to ceramics and polymers. Autoetch 590 has a process chamber suitable for handling substrates up to 7.5" x 7.5" (190 x 190 mm) in size and can process wafers up to 175 mm. The equipment can achieve a high degree of precision and repeatable results while offering process versatility. LAM RESEARCH Autoetch 590 utilizes a wide range of etching processes, including Dry etch, Wet etch, Plasma etch, Ash, and Dip etch. The etch times and power parameters can be finely controlled with Autoetch 590, allowing for uniform process control. LAM RESEARCH Autoetch 590 features a fully-integrated auto-loading system, allowing for repeatable process alignment and process results. Autoetch 590 operating parameters, tolerances and recipes are easy to set up and program to ensure optimum unit performance. LAM RESEARCH Autoetch 590 includes a real-time status display, allowing for troubleshooting or optimization of the process without the need to interrupt the process. Autoetch 590 also includes an RF generator and power supply which can be set up for a variety of substrates. The RF feature helps to minimize contamination of the process area during etching. LAM RESEARCH Autoetch 590 includes an advanced process monitor which can track the results of the etching process and verify that the desired parameters have been met. Autoetch 590 also offers remote control capabilities, allowing the machine to be operated from a remote location. LAM RESEARCH Autoetch 590 is compatible with a variety of operating systems, including Windows, Mac, and Linux. The tool is certified to meet a variety of safety and environmental requirements, including SEMI E34, IEC 60601-1-1, and UL 698A. Overall, Autoetch 590 is an industry-leading etcher and asher which is capable of delivering high precision etching results while offering process versatility. Its advanced operating asset and integrated auto-loading model make it an ideal choice for a variety of applications.