Used LAM RESEARCH Autoetch 590 #9201785 for sale

LAM RESEARCH Autoetch 590 is a state-of-the-art plasma asher and etcher. Its novel thermal processing technology delivers consistently high-quality etching and plasma treatments in a broad range of process applications. Autoetch 590 features an integrated etcher/plasma system, offering greater throughput and a reduced footprint for etching and plasma operations. LAM RESEARCH Autoetch 590 is capable of processing flat panel displays and large substrates with high resolution etching and uniform plasma treatments over the entire substrate area. With a process chamber size up to 12 inches (30 cm) and a maximum substrate size of 10.4 inches (26 cm), it offers maximum flexibility for large areas. The device also provides compatibility with a wide range of standard industry etching and plasma chemistries and solvents. Autoetch 590 is equipped with an integrated control system, which enables precise control and monitoring of all etching and plasma processes. The controller includes a full range of process parameter settings to ensure maximum process optimization. It also features multiple automatic safety features that ensure safety and reliability in use and operation. LAM RESEARCH Autoetch 590 is designed for easy maintenance, with all components accessible from the top side of the unit. Standard maintenance tasks, such as filter changes, can be completed without the need for tools. The unit features an adjustable gas flow valve and a particle counter, enabling users to optimize gas flow for precise results. Autoetch 590 is equipped with an automated monitoring system, which tracks and records process parameters in real-time. This enables operators to better assess the status of the process and to make adjustments if required. With a range of built-in functions, LAM RESEARCH Autoetch 590 can be remotely controlled from any PC with an internet connection. Overall, Autoetch 590 offers an efficient, reliable and versatile plasma asher and etcher for a wide range of display and solar applications. With superior control, precise process optimization, and easy maintenance, LAM RESEARCH Autoetch 590 is the ideal tool for high-quality etching and plasma operations.