Used LAM RESEARCH Autoetch 590 #9300196 for sale

LAM RESEARCH Autoetch 590 is an advanced plasma etcher and asher used in semiconductor fabrication. It is a multi-stage asher-etch equipment capable of both etching and ashing small and large parts with simultaneous uniformity and plasma density. Autoetch 590 is designed to create the highest quality final product in both time and cost efficiency. LAM RESEARCH Autoetch 590 features a fully automated open-frame design for maximum system access and uses a two-stage operation to etch and ash parts. The first stage provides a rapid and exact etch time, while the second stage utilizes a modified ashing technique that produces a constant release of free radicals for a more uniform plasma density. This process provides excellent etch results without the risk of damage or erosion of the parts. Autoetch 590 also offers advanced control over the etch and ashing process, providing precise control of both the RF power and etching cycle time. Its automatic self-tuning feature combines a series of tests to adjust the plasma generation for optimal etching performance, allowing for optimal etch and ashing results. The advanced unit can also be modified to fit specific requirements for etching and ashing. It is also capable of accommodating multiple DC power supplies, providing the ability to etch and ash multiple components simultaneously. LAM RESEARCH Autoetch 590 offers a reliable, repeatable, and long lasting performance for all kinds of etching and ashing applications. Additionally, the machine also offers an optional advanced process monitoring feature to allow the user to keep track of the tool's performance, as well as providing emergency shut down features for added safety. With its advanced features and features, Autoetch 590 is an excellent tool for etching and ashing a variety of components.