Used LAM RESEARCH Autoetch 790 #9300198 for sale

LAM RESEARCH Autoetch 790
ID: 9300198
Wafer Size: 6"
Etcher, 6".
LAM RESEARCH Autoetch 790 is a high-performance etcher/asher specifically designed to meet the requirements of the semiconductor, MEMS, and optoelectronic industries. It features a highly configurable architecture that allows users to tailor it to individual needs. Autoetch 790 is designed to provide precise etch control and low operating costs while emphasizing safety and reliability. The equipment features an advanced large-area substrate delivery system that provides uniform wafer handling and can process up to 8 inch wafers. The large-area substrate delivery unit also allows for multi-chicago wafer loading and wafer grouping. The machine is designed with a fully-automated substrate pre-treatment process that ensures substrate cleanliness and provides uniform etch concentrations across the entire wafer. LAM RESEARCH Autoetch 790 also features advanced digital temperature control modules that allow precise temperature control of etchant materials. This ensures uniform processing of the substrates while minimizing etchant consumption. It also features an intuitive graphical user interface that helps users quickly and easily select recipe parameters, monitor process conditions, and detect potential process defects. Autoetch 790 is equipped with an efficient process exhaust tool that ensures minimal environmental impact by removing etch residues and hazardous materials. It also features an advanced containment asset that keeps particles, fumes, and process chemicals contained within the model. This ensures the equipment does not contaminate the facility or endanger personnel. The system is designed with multiple safety features such as fault monitoring, static and dynamic pressure controls, end-of-run sensors, and emergency shutoffs. Additionally, it is designed to meet all applicable safety standards and is certified to use in a Class 1, Division 1, Group D hazardous materials environment. LAM RESEARCH Autoetch 790 is a robust, reliable, and user-friendly etcher/asher that is designed to meet the requirements of the semiconductor, MEMS, and optoelectronic industries. It offers precise etch control, low operating costs, and a high level of safety and reliability.
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