Used LAM RESEARCH Chamber for 2300 Exelan Flex FX #9240243 for sale

LAM RESEARCH Chamber for 2300 Exelan Flex FX is an advanced plasma etcher and asher designed for the semiconductor manufacturing industry. It provides precise and reliable etching and ashing of various materials for a range of device applications. An automated computer control equipment handles process set-up, coordination, recipe development, and data collection for optimized production results. This chamber has a fully-automated Exelan Flex FX process that provides a wide range of selectable conditions for etching and ashing, allowing superior process control with minimal human intervention. The system operates in a variety of chamber sizes, from 2 to 8 feet in width, and features a TiN/TiCN (titanium nitride/titanium carbonitride) plated chamber to ensure superior etch selectivity and process stability. The unit is also equipped with a versatile enclosed-clamshell geometry, which reduces the risk of particulate contamination while providing improved process access and thermal insulation. This chamber also offers advanced process monitoring and control. A multi-channel quartz crystal RF power monitor is installed, along with an RF voltage, temperature, pressure, and two-axis pressure recorder. In addition, the Exelan Flex FX includes two gas sources for independent RF and DC bias control, allowing for process tuning for maximum etch selectivity and improved production. An automated robotic loader/unloader is also installed, providing quick turnaround times for every loaded or unloaded batch. The chamber is designed to accommodate a wide range of process recipes and options, including etching of various materials such as silicon, silicon oxide, silicon nitride, and metals. The chamber's modular design and integrated tools enable fast and efficient tuning to achieve the optimal process results for each application. Moreover, the machine is compatible with a variety of batch types, including single wafers, up to small wafer batches of 800 -150mm. Chamber for 2300 Exelan Flex FX is an exceptionally advanced, reliable, and versatile etcher/asher used in semiconductor manufacturing. Its advanced features provide users with maximum control and flexibility for outstanding process results.