Used LAM RESEARCH / DRYTEK 384T #9036715 for sale

LAM RESEARCH / DRYTEK 384T is an etcher/asher equipment designed for the fabrication of semiconductor device layers. It is a full-featured etcher/asher platform with a user interface that allows for easy access to the various functions of the system. This unit can etch at several different angles ranging from 0 degrees to 45 degrees in order to provide maximum selectivity between the different process steps. Additionally, it is capable of achieving a process rate up to 100nm/min because of its advanced technology which includes a high-performance batch microwave generator, high-resolution end-point detector, and an automatic recipe control machine. The etch process can be further optimized for device requirements through the use of the high-resolution end-point detector the tool is equipped with. DRYTEK 384T is designed to form effective channels in the range of 150-300mm in width. It is also capable of achieving an aspect ratio up to 50:1, which enables the etching of sub-micron features and dielectric layers with excellent shape and uniformity. Moreover, the asset includes three process chambers, each providing different capabilities. The first chamber concerns with deposition control and has a mechanism for efficient depositing of photoresist along with target materials. The second and the third chambers are dedicated exclusively for etching and polishing the wafers. The third chamber is used for cleaning the wafers after etching process. In addition, LAM RESEARCH 384T is equipped with two advanced plasma sources, which provide an additional level of versatility in terms of etching process. Furthermore, this model also offers various features to ensure safety during operation. A process chamber is equipped with a coolant equipment which keep the chamber at a steady temperature. Also, multiple gates and shields prevent possible exposure of the process chamber's volatile gases. Additionally, 384T includes several safety inter locks and a high-speed gas curtain to protect the operators and other personnel from hazardous gases. Overall, LAM RESEARCH / DRYTEK 384T is an excellent etcher/asher platform for the fabrication of semiconductor devices. It is an ideal choice for researchers and experimentalists thanks to its versatility, efficiency, and safety features.