Used LAM RESEARCH / DRYTEK DRIE-100 #293645358 for sale

LAM RESEARCH / DRYTEK DRIE-100 is an etcher/asher designed for use in the semiconductor industry, offering advanced etching and ashing capabilities for single-wafer and batch processes. The equipment features a large cathode area and high-pressure, high-pulse discharge capability to provide superior etch-rate consistency, etch depth control, and mechanical cooling for demanding-high temperature and abrasive materials. The system's powerful generator and power supply allow users to adjust the etching parameters for high precision and flexibility. DRYTEK DRIE-100 employs advanced reactive ion etching and ashing techniques, allowing users to etch and ashing materials to extremely small depths with minimal damage to the substrate. An onboard gas delivery unit is also included, providing repeatable flow and Recipe-based chemistry control. Additional features include advanced two-dimensional jet-flow patterning technology, high-precision in-situ end point control, comprehensive process monitoring, automated wafer substrate level vacuum, and the ability to monitor and control the chamber vacuum. LAM RESEARCH DRIE-100 includes a number of advanced safety features, including built-in pressure regulation, Operator Access Door with air lock, exhaust filtration, and sophisticated leak detection. The machine is also certified to the UL, CE, and SiaCG standards for health and safety. Overall, DRIE-100 is an advanced and reliable etcher/asher tool that offers superior performance and increased process flexibility. Its multiple safety features make it suitable for use in a wide variety of semiconductor processes. The asset's adjustable etching parameters allow for precise control, making it perfect for specialized etch and ashing requirements.