Used LAM RESEARCH / DRYTEK Megastrip 6 #9093530 for sale
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ID: 9093530
Plasma etcher
(1) DryTek Circuit Breaker Rackmount
(1) DryTek 13.56MHz RF Power Source Rackmount
(1) MKS Type 252A Exhaust Valve Controller Module
(1) MKS PDR-C-IB Module
(1) Optical Detector Module
(1) MKS Type 260 Controller Module
60Hz, 30 A, 208VAC.
LAM RESEARCH / DRYTEK Megastrip 6 is a state-of-the-art etching/stripping equipment designed to precisely strip plasma materials from the surface of semiconductor and other substrates. With a 5-axis robot, the etching chamber can reach up to sixsquare feet in size with the latest technology in chamber design and interior lining. This system offers superior levels of repeatability and reproducibility which allows for ultra-fine resolution substrates and features for precision circuit designs. DRYTEK Megastrip 6 is designed with an in-line remote control unit and He3/Xe+ gas delivery machine which allow for extremely accurate removal of unwanted materials. The tool is equipped with an ultra-precise gas flow delivery asset and a three-sided viewing port for an improved, ultra-clear view. This gas delivery model also ensures that the gas mix remains within specification during operation to avoid component and substrate damage. LAM RESEARCH Megastrip 6 offers a wide array of etching conditions to allow for the greatest level of design flexibility. With advanced movie mode equipment settings, users will be able to precisely control the plasma etch process which ensure highly efficient operation and superior performance. Megastrip 6 is also equipped with an ultrasonic tank for rinsing components after the etch process. This tank is designed to increase controlled rinse pressure and temperature to ensure proper cleaning of components and allow for residue free surfaces. Finally, LAM RESEARCH / DRYTEK Megastrip 6 is equipped with an advanced wafer flipper which allows users to rapidly flip wafers between the wet and dry process chambers. This drastically improves efficiency by allowing wafers to be quickly prepared after etching and to be readily sent to the next step in the fabrication process. In conclusion, DRYTEK Megastrip 6 is a powerful and highly advanced etch/stripping system which can be used for precision fabrication and production. The in-line remote control unit, three-sided viewing port and movie mode machine allow for the finest control of the etch process while the advanced wafer flipper makes wafer setup and transfer faster and more efficient. With these superior performance benefits, it's no wonder why LAM RESEARCH Megastrip 6 is quickly becoming a prominent fixture in the semiconductor industry.
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