Used LAM RESEARCH / DRYTEK PS-80 #188465 for sale

LAM RESEARCH / DRYTEK PS-80 etcher and asher equipment is one of the most versatile and advanced tools available for etching and ashing applications. It is designed to deliver reliable, repeatable results with excellent uniformity. The system provides accurate etching and ashing via high temperature, high power, and precise control of parameters. DRYTEK PS-80 includes a high-frequency RF generator for precision etching and ashing, and a plasma chamber equipped with an automatic door and custom skid. The RF generator can be set to variable power levels, and is capable of reaching temperatures of up to 600 °C. The pressure level can also be adjusted manually, providing an adjustable range of 0 - 600 mTorr. The PR unit allows users to customize process recipes for etching, and includes a variety of advanced safety features. The machine features a chamber vacuum tool with a turbo-molecular pump and a 100-liters per second ion pump. This provides excellent pumping speed and air evacuation within the chamber, allowing for precision etching and ashing. LAM RESEARCH PS-80 also includes a high-pressure shock generator, which allows preset process recipes to be used without needing to change the settings manually. Additionally, the asset includes an optional load lock chamber, allowing for the transfer of a sample tray without exposing it to open air. For isolation and evacuation of the plasma, PS-80 includes a two-stage automated vacuum model and an Oxide-Agnostic™ plasma source. This ensures a more precise etching and ashing process, with improved uniformity, and makes it easier and faster to change recipes and process parameters. LAM RESEARCH / DRYTEK PS-80 also includes a chemical delivery equipment, providing a precise control of reactants for even and precise etching and ashing processes. DRYTEK PS-80 etcher and asher system is an ideal tool for applications requiring precise etching and ashing. It provides users with an enhanced level of control over the parameters used, and is capable of reaching temperatures of up to 600 °C. Additionally, the unit includes a variety of advanced safety features, providing accurate results with excellent uniformity.