Used LAM RESEARCH / DRYTEK Quad #9038448 for sale

LAM RESEARCH / DRYTEK Quad is a state-of-the-art etcher and asher equipment used in thin films deposition and photolithography processing. The system is composed of four chambers, each featuring an independent plasma source. The chambers work in tandem, allowing for the simultaneous etching and/or ashing of multiple films. This process is ideal for thin films deposition and enables future advances in photolithography based on optical microstructure fabrication. The first chamber is used primarily for oxygen-based etching. It consists of a stainless steel cathode and a quartz anode. The cathode is powered by an adjustable DC voltage which can be managed from the front panel in order to control the process. An RF generator powers the quartz anode, whose function is to produce an oxygen-rich plasma and ensure a uniform etching rate. The second and third chambers are both used for ashing, however the third also features an adjustable cathode. The third and fourth chambers alike feature a carbon source which is injected into their sealed plasmas using a mass flow controller. The fourth chamber is designed for etching and additionally provides a quartz shroud during the process. This makes the entire unit extremely safe while promoting connectivity and compatibility with the other chambers. The machine also features a programmable logic controller (PLC) which is used to adjust the ion energies and flow rate of the gases used in each of the chambers. This allows for precise control of the etching and ashing processes which is vital for optoelectronic applications. Finally, the tool is entirely computer-controlled, allowing for detailed recipe-based automation. This allows for a higher level of repeatability, as well as the ability to monitor each operation in real-time. In conclusion, DRYTEK Quad is a versatile and powerful etcher and asher asset. Its advanced features make it an ideal tool for thin films deposition and photolithography processing. The flexibility of the PLC combined with the precise control offered by the adjustable cathodes and quartz shroud makes the model a valuable asset in any optoelectronic lab.